期刊
REVIEW OF SCIENTIFIC INSTRUMENTS
卷 88, 期 3, 页码 -出版社
AIP Publishing
DOI: 10.1063/1.4978656
关键词
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资金
- U.S. Department of Energy (DOE), Office of Science, Office of Basic Energy Sciences, Division of Materials Science and Engineering
- DOE Office of Science User Facility operated for the DOE Office of Science by Argonne National Laboratory [DE-AC02-06CH11357]
We describe an instrument that exploits the ongoing revolution in synchrotron sources, optics, and detectors to enable in situ studies of metal-organic vapor phase epitaxy (MOVPE) growth of III-nitride materials using coherent x-ray methods. The system includes high-resolution positioning of the sample and detector including full rotations, an x-ray transparent chamber wall for incident and diffracted beam access over a wide angular range, and minimal thermal sample motion, giving the sub-micron positional stability and reproducibility needed for coherent x-ray studies. The instrument enables surface x-ray photon correlation spectroscopy, microbeam diffraction, and coherent diffraction imaging of atomic-scale surface and film structure and dynamics during growth, to provide fundamental understanding of MOVPE processes. Published by AIP Publishing.
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