期刊
REVIEW OF SCIENTIFIC INSTRUMENTS
卷 88, 期 6, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4984124
关键词
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资金
- National Natural Science Foundation of China [51425504, 51575488, 51605429]
- Science Fund for Creative Research Groups of National Natural Science Foundation of China [51521064]
- Zhejiang Provincial Natural Science Foundation of China [LZ13E050001]
A new prototype non-contact profiler based on surface tracking has been specially developed. Surface tracking is carried out by a specially designed dual stage probe system with the aid of a four-Degree Of Freedom high-precision motion platform. The dual stage probe system keeps a short-range optical probe constantly tracking the surface by a self-developed voice coil motor servo, by which a wide measuring range of up to 10 mm is realized. The system performance evaluation including resolution, repeatability, and scanning speed proved the good capability of the new prototype non-contact profiler. To realize a full area covered 3D profile measurement of special-shaped optics within one scanning procedure, a signal intensity monitor integrated in the surface tracking controller is specially developed. In the experiment, a snip-single-corner-rectangular-shaped freeform surface was successfully measured over full area by the new non-contact profiler. This work provides an effective solution for 3D profile measurement of special-shaped optical surfaces over full reflecting area. Experimental results demonstrate that the proposed measuring system is of great significance in quality evaluation of optical surfaces. Published by AIP Publishing.
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