期刊
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
卷 36, 期 2, 页码 -出版社
A V S AMER INST PHYSICS
DOI: 10.1116/1.5004621
关键词
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资金
- National Research Foundation of Korea (NRF) - Korean government (MSIP: Ministry of Science), ICT & Future Planning [NRF-2017M2A2A4A01020658]
- BK21 Plus Program (Future-oriented innovative brain raising type - Ministry of Education (MOE, Korea) [21A20130000018]
- National Research Foundation of Korea (NRF)
- National Research Foundation of Korea [2017M2A2A4A01020658] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
Deep-ultraviolet (UV) light is widely used in many industries including medicine because it has sufficient energy to kill viruses and bacteria. However, deep UV with a wavelength of 254 nm can damage human cells, so it is necessary to develop a deep-UV light source with a shorter wavelength to minimize the damage to human cells while still killing viruses. The authors used a carbon nanotube-based cold-cathode electron beam (C-beam) and wide-bandgap anode to fabricate a deep-UV light source with an emission wavelength below 250 nm. The anode was fabricated by annealing ZnO ink on a Si wafer; deep UV with a wavelength of 247 nm and full width at half maximum of 23 nm was obtained. In the case of C-beam irradiation of an anode fabricated on a quartz substrate, deep UV with wavelengths of 208, 226, and 244 nm was generated through excitation with a beam energy of 7 kV and beam currents of 0.3 and 0.5 mA. Published by the AVS.
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