Effect of Photo Catalysis on the Properties of NiZnO Film Grown by MOCVD

NiZnO thin films were grown on c-plane sapphire substrates by photo-catalysis metal organic chemical vapor deposition system. The samples with the different catalysis intensity were grown and the effects of catalysis intensity on the crystal, opticalproperties and surface morphology of the NiZnO films were researched. With the raising catalysis intensity, it can be found that the grain size of samples increased and thecrystal and optical properties improved remarkably. The main reason was the photon energy can provided the chemical processing higher activation energies and diffusion ability, whichwas benefit for atomic rearrangement to decrease the defect density. The photocatalysis had an important effect in the films oxidation process by MOCVD.