Study of Force-feedback Tactile Sensor Fabricated by AlN Doped ZnO Piezoelectric Film

In this study, we have developed a flexible MN doped ZnO tactile sensor. This flexible sensor can be applied on the complex surface of the device. The tactile sensor is fabricated by AlN doped ZnO thin film deposited on the flexible polyimide (PI) substrate or copper substrate. The sol-gel method and spin-coating method are utilized to prepare the AlN doped ZnO piezoelectric films. We have also investigated the influences of the speed of spin-coating on the crystallinity and piezoelectric properties of the thin films. The methods of X-ray diffraction and scanning electron microscopy are used to examine the crystallinity and the surface topography of the AlN doped ZnO thin films. In addition, the force-feedback analyses are performed to compare the output voltages between the sensors on the PI substrate and copper substrate. The response of force feedback proves the availability of this flexible tactile sensor and its robust piezoelectric properties.