期刊
ADVANCED OPTICAL TECHNOLOGIES
卷 7, 期 4, 页码 255-264出版社
WALTER DE GRUYTER GMBH
DOI: 10.1515/aot-2018-0013
关键词
femtosecond laser ablation; silicon laser ablation; two-dimensional morphology; two-temperature model
类别
资金
- Bundesministerium fur Wirtschaft und Energie (BMWi) in the project MONOSCRIBE [0325922A]
- DFG [HU1893/2-1]
- Spectra Physics Austria
- Austrian Federal Ministry of Economy, Family and Youth
- National Foundation for Research, Technology and Development
Ultrashort laser pulses are widely used for the precise structuring of semiconductors like silicon (Si). We present here, for the first time, a comparative study of experimentally obtained and numerically simulated two-dimensional ablation profiles based on parameters of commercially relevant and widely used near-infrared and diode pumped femtosecond lasers. Single pulse laser ablation was studied at a center wavelength of 1040 nm and pulse duration of 380 fs (FWHM) in an irradiating fluence regime from 1 J/cm(2) to 10 J/cm(2). Process thresholds for material transport and removal were determined. Three regimes, scaling with the fluence, could be identified: low and middle fluence regimes and a hydrodynamic motion regime. By comparing the simulated and experimental ablation profiles, two conclusions can be drawn: At 2 J/cm(2), the isothermal profile of 3800 K is in excellent agreement with the observed two-dimensional ablation. Thus exceeding a temperature of 3800 K can be accepted as a simplified ablation condition at that fluence. Furthermore, we observed a distinct deviation of the experimental from the simulated ablation profiles for irradiated fluences above 4 J/cm(2). This points to hydrodynamic motion as an important contributing mechanism for laser ablation at higher fluences.
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