期刊
OPTICS LETTERS
卷 43, 期 1, 页码 98-101出版社
OPTICAL SOC AMER
DOI: 10.1364/OL.43.000098
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资金
- National Natural Science Foundation of China (NSFC) [51675049, 91323301]
- Natural Science Foundation of Beijing Municipality [3172027]
- Young Elite Scientists Sponsorship Program [2016QNRC001]
We proposed combining temporally shaped (double-pulse train) laser pulses with spatially shaped (Bessel beam) laser pulses. By using a temporally shaped femtosecond laser Bessel-beam-assisted chemical etching method, the energy deposition efficiency was improved by adjusting the pulse delay to yield a stronger material modification and, thus, a higher etching depth. The etching depth was enhanced by a factor of 13 using the temporally shaped Bessel beam. The mechanism of etching depth enhancement was elucidated by localized transient-free electrons dynamics-induced structural and morphological changes. Micro-Raman spectroscopy was conducted to verify the structural changes inside the material. This method enables high-throughput, high-aspect-ratio microchannel fabrication in fused silica for potential applications in microfluidics. (c) 2017 Optical Society of America
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