期刊
OPTICS EXPRESS
卷 25, 期 25, 页码 31431-31442出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.25.031431
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资金
- National Natural Science Foundation of China (NSFC) [91323301, 51675049]
- Beijing Municipal Natural Science Foundation [3172027]
- Young Elite Scientists Sponsorship Program [2016QNRC001]
In this paper, we investigated the material redistribution phenomenon controlled by spatially modulated femtosecond laser pulses on a silicon surface. The intensity distribution was shaped by using a spatial light modulator. The material was first selectively melted and then redistributed by the laser-induced plasma. Thus, complex surface patterns were formed conformal to the laser intensity distribution. Sub-diffraction-limit size can be achieved due to the nanoscale material redistribution. Only one pulse was needed in the surface patterning process, thus greatly favoring the efficiency improvement. Combined with multibeam interference, a large-scale nanostructure array can be fabricated with high efficiency of 1600 mu m(2)/pulse. This method offers a simple, flexible and efficient alternative approach for nanoscale surface patterning applications. (C) 2017 Optical Society of America
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