期刊
OPTICAL ENGINEERING
卷 56, 期 4, 页码 -出版社
SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
DOI: 10.1117/1.OE.56.4.044103
关键词
surface metrology; Gates' interferometer; fringe projection; resolution
类别
资金
- CONICYT-PCHA/Doctorado Nacional [2013-63130065]
- FONDECYT [Preis 3140076, Preis 1140239, Preis 1120764]
- FONDEF [Preis IT13I10034]
- CORFO [Preis 14BPC4-28651, Preis 15BPE-47233]
- USACH-DICYT ASOCIATIVO
- SEP-PROMEP [Preis 14146 F-38]
- UTFSM-DGIP
We show how a sinusoidal fringe pattern can be obtained by using a single cube beam splitter based on the Gates' interferometer configuration. When an expanded and collimated laser beam hits the binding edge of a nonpolarizing cube beam splitter parallel to the splitter coating, it generates interference fringes at the exit due to the internal reflections and refractions of the laser beam passing through the cube. Unlike common digital projection systems, the proposed optical arrangement generates a perfectly sinusoidal and continuous fringe pattern, minimizing the problems associated with the discretization of a synthetic digital signal. The fast Fourier transform and phase-shifting techniques are used to demodulate the captured fringe patterns. Experimental results are presented for the three-dimensional shape reconstruction of the relief of a coin and of a spherical indentation on a piece of aluminum with a maximum height of about 150 mu m. In addition, we evaluate the accuracy and resolution of the proposed measuring device: shape reconstruction accuracy is about 1.4% and axial resolution is 0.15 mu m. Due to its simple and compact setup, the proposed system is particularly suited to be miniaturized. (C) 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
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