期刊
OPTICAL ENGINEERING
卷 56, 期 8, 页码 -出版社
SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
DOI: 10.1117/1.OE.56.8.084107
关键词
scanning Shack-Hartmann sensor; subaperture stitching; freeform optics; null diffractive optical element
类别
资金
- Department of Science and Technology (DST), India
- German Academic Exchange Service (DAAD), Germany
- Indo-German DST-DAAD
- German Science Foundation
The metrology of freeform wavefront can be performed by the use of a noninterferometric method, such as a Shack-Hartmann sensor (SHS). Detailed experimental investigations employing an SHS as metrology head are presented. The scheme is of nonnull nature where small subapertures are measured using an SHS and stitched to give the full wavefront. For the assessment of complex misalignment errors during the spiral scanning, a library of residual slope errors has been created, which makes the alignment process fast converging for minimizing the scanning errors. A detailed analysis of the effects of slope and positioning error on reproducibility is presented. It is validated by null test where a null diffractive optical element has been used in a Mach-Zehnder configuration for compensating the freeform shape. A freeform optics is measured by both measurement schemes, and the results are in good agreement. Further, the nonnull-based scanning subaperture stitching scheme is also validated by performing measurements on an aspheric surface and compared with the measurements from the interferometric method (Zygo Verifire). (C) 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
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