期刊
OPTICAL ENGINEERING
卷 56, 期 9, 页码 -出版社
SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
DOI: 10.1117/1.OE.56.9.094108
关键词
femtosecond laser three-dimensional (3-D) microfabrication; 3-D printing; nanotechnology; microfluidics; lab-on-chip
类别
资金
- NATO [SPS-985048]
- European Commission's Seventh Framework Programme Laserlab-Europe IV JRA support BIOAPP [EC-GA 654148]
An approach employing ultrafast laser hybrid subtractive-additive microfabrication, which combines ablation, three-dimensional nanolithography, and welding, is proposed for the realization of a lab-on-chip (LOC) device. A single amplified Yb:KGW femtosecond (fs)-pulsed laser source is shown to be suitable for fabricating microgrooves in glass slabs, polymerization of fine-meshes microfilter out of hybrid organic-inorganic photopolymer SZ2080 inside them, and, finally, sealing the whole chip with cover glass into a single monolithic piece. The created microfluidic device proved its particle sorting function by separating 1- and 10-mu m polystyrene spheres in an aqueous mixture. All together, this proves that laser microfabrication based on a single amplified fs laser source is a flexible and versatile approach for the hybrid subtractive-additive manufacturing of functional mesoscale multimaterial LOC devices. (C) 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
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