Thermally activated microstructural evolution of sputtered nanostructured Mo-Au

The microstructural evolution of a sputtered Mo-Au nanometallic multilayers was investigated by annealing samples at temperatures ranging from 350 degrees C to 1000 degrees C. Differential scanning calorimetry was used as a guide to determine critical thermal events where crucial microstructural changes could occur. Complementary techniques of transmission electron microscopy and atom probe tomography revealed distinct nanostructures at the selected temperatures, which were governed by thermal processes such as recrystallization and grain growth. As the microstructure evolved with temperature, thermodynamic and kinetic stabilization mechanisms were identified, indicating that both mechanisms appear to have a role in stabilizing the microstructure. This study highlights the complex interplay within mechanisms and processes which serves as a roadmap for understanding the developments of nanoscale structures.