期刊
NONLINEAR DYNAMICS
卷 91, 期 4, 页码 2157-2170出版社
SPRINGER
DOI: 10.1007/s11071-017-4007-y
关键词
Electrostatic; Instability; Micro-plate; MEMS; Period-doubling; Dynamic pull-in
资金
- NanoNextNL
- Government of the Netherlands
Characterization of nonlinear behavior of micro-mechanical components in MEMS applications plays an important role in their design process. In this paper, nonlinear dynamics, stability and pull-in mechanisms of an electrically actuated circular micro-plate subjected to a differential pressure are studied. For this purpose, a reduced-order model based on an energy approach is formulated. It has been shown that nonlinear dynamics of an electrically actuated micro-plate, in the presence of differential pressure, significantly differs from those under purely electrostatic loads. The micro-plate may lose stability upon either saddle-node or period-doubling bifurcations. It has also been found that in the presence of a differential pressure, increasing the DC or AC voltages may surprisingly help to stabilize the motion of the micro-plate.
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