期刊
CHEMICAL PAPERS
卷 72, 期 9, 页码 2143-2151出版社
SPRINGER INTERNATIONAL PUBLISHING AG
DOI: 10.1007/s11696-018-0420-z
关键词
SiO2 films; Glass; Mechanical properties; Refractive index; Residual stress
资金
- Operational Programme Research, Development, and Education-European Regional Development Fund of the Ministry of Education, Youth and Sports of the Czech Republic [CZ.02.1.01/0.0/0.0/16_013/0001403]
- European Regional Development Fund OPPK [CZ.2.16/3.1.00/21545]
The optical and mechanical properties of amorphous SiO2 films deposited on soda-lime silicate float glass by reactive RF magnetron sputtering at room temperature were investigated in dependence of the process pressure. The densities of the films are strongly influenced by the process pressure and vary between 2.38 and 1.91 g cm(-3) as the pressure changes from 0.27 to 1.33 Pa. The refractive indices of the films shift between 1.52 and 1.37, while the residual compressive stresses in the deposited films vary in the range from 440 to 1 MPa. Hardness and reduced elastic modulus values follow the same trend and decline with the increase of process pressure from 8.5 to 2.2 GPa and from 73.7 to 30.9 GPa, respectively. The abrasive wear resistance decreases with the density of the films.
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