期刊
NATURE ELECTRONICS
卷 1, 期 10, 页码 555-561出版社
NATURE PUBLISHING GROUP
DOI: 10.1038/s41928-018-0148-3
关键词
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资金
- European Union (EU)
- Free State of Saxony through the European Regional Development Fund (ERDF) (SAB GroTEGx) [100245375]
- EU's Horizon 2020 research and innovation program (H2020 RIA Tips) [644453]
- Mexican National Council for Science and Technology [CVU611106]
Microthermoelectric modules are of potential use in fields such as energy harvesting, thermal management, thermal imaging and high-spatial-resolution temperature sensing. In particular, microthermoelectric coolers (mu-TECs)-in which the application of an electric current cools the device-can be used to manage heat locally in microelectronic circuits. However, a cost-effective mu-TEC device that is compatible with the modern semiconductor fabrication industry has not yet been developed. Furthermore, the device performance of mu-TECs in terms of transient responses, cycling reliability and cooling stability has not been adequately assessed. Here we report the fabrication of mu-TECs that offer a rapid response time of 1 ms, reliability of up to 10 million cycles and a cooling stability of more than 1 month at constant electric current. The high cooling reliability and stability of our mu-TEC module can be attributed to a design of free-standing top contacts between the thermoelectric legs and metallic bridges, which reduces the thermomechanical stress in the devices.
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