期刊
2018 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS)
卷 -, 期 -, 页码 -出版社
IEEE
DOI: 10.1109/TITS.2018.2852646
关键词
MEMS; piezoelectric actuation; microstage; PZT
资金
- National Natural Science Foundation of China [61804023]
- Key R&D Program of Sichuan Province [2018GZ0527]
Increasing the number of degree of freedom and reducing the cross-axis coupling simultaneously is a critical challenge for the development of advanced microstage. Herein, resulting from introducing a new two stage symmetric geometry by the combination of spring shaped beam and crab-leg-like anchor, a six-degree-of freedom (6-DOF) multi-axis microstage is proposed in this paper. This microstage well responses the above challenge, which allows precise control of movements in both translational and tilting modes along three axes. A 2mm x 2mm positioning microstage with four suspended pairs of crab-leg anchors and spring beams made of PZT/Si bimorph layers. Finite element simulation results show that this microstage attained a large displacement in all 6-DOF domains, and moreover the cross-axis coupling is reduced significantly. The equilibrium of large displacement, multi degree of freedom and weak cross-axis coupling is realized by using this novel two-stage symmetric strategies.
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