期刊
NANOSCALE RESEARCH LETTERS
卷 12, 期 -, 页码 -出版社
SPRINGER
DOI: 10.1186/s11671-017-1921-3
关键词
RBS; MoN; Multilayer; Microstructure; Depth profiling
资金
- National Natural Science Foundation of China [11375133, 11405133]
- Suzhou Scientific Development Project [ZXG201448]
- Wuhan Science and Technology Bureau [2016030409020219]
(Ti, Al) N/MoN and CrN/MoN multilayered films were synthesized on Si (100) surface by multi-cathodic arc ion plating system with various bilayer periods. The elemental composition and depth profiling of the films were investigated by Rutherford backscattering spectroscopy (RBS) using 2.42 and 1.52 MeV Li2+ ion beams and different incident angles (0 degrees, 15 degrees, 37 degrees, and 53 degrees). The microstructures of (Ti, Al) N/MoN multilayered films were evaluated by X-ray diffraction. The multilayer periods and thickness of the multilayered films were characterized by scanning electron microscopy (SEM) and high-resolution transmission electron microscopy (HR-TEM) and then compared with RBS results.
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