期刊
MICROSCOPY AND MICROANALYSIS
卷 23, 期 1, 页码 1-10出版社
CAMBRIDGE UNIV PRESS
DOI: 10.1017/S1431927616012769
关键词
electron channeling pattern; ECP; dynamical electron scattering; dictionary matching
资金
- Air Force Office of Scientific Research (AFOSR) MURI program [FA9550-12-1-0458]
- Materials Characterization Facility at CMU [MCF-677785]
The dictionary-based approach to the indexing of diffraction patterns is applied to electron channeling patterns (ECPs). The main ingredients of the dictionary method are introduced, including the generalized forward projector (GFP), the relevant detector model, and a scheme to uniformly sample orientation space using the cubochoric representation. The GFP is used to compute an ECP master pattern. Derivative free optimization algorithms, including the Nelder-Mead simplex and the bound optimization by quadratic approximation are used to determine the correct detector parameters and to refine the orientation obtained from the dictionary approach. The indexing method is applied to poly-silicon and shows excellent agreement with the calibrated values. Finally, it is shown that the method results in a mean disorientation error of 1.0 degrees with 0.5 degrees SD for a range of detector parameters.
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