期刊
MICROFLUIDICS AND NANOFLUIDICS
卷 21, 期 11, 页码 -出版社
SPRINGER HEIDELBERG
DOI: 10.1007/s10404-017-2007-3
关键词
CMOS; Ge photodiode; Large-scale fabrication; Collinear sensing; Microfluidic; Optofluidic
资金
- University of Stuttgart
- Ministry of Science and Education of Baden-Wuerttemberg (RiSC)
- Institute of Electron Devices and Circuits at Ulm University
Vertical optofluidic biosensors based on refractive index sensing promise highest sensitivities at smallest area footprint. Nevertheless, when it comes to large-scale fabrication and application of such sensors, cheap and robust platforms for sample preparation and supply are needednot to mention the expected ease of use in application. We present an optofluidic sensor system using a cyclic olefin copolymer microfluidic chip as carrier and feeding supply for a complementary metal-oxide-semiconductor compatibly fabricated Ge PIN photodetector. Whereas typically only passive components of a sensor are located within the microfluidic channel, here the active device is directly exposed to the fluid, enabling top-illumination. The capability for detecting different refractive indices was verified by different fluids with subsequent recording of the optical responsivity. All components excel in their capability to be transferred to large-scale fabrication and further integration of microfluidic and sensing systems. The photodetector itself is intended to serve as a platform for further sophisticated collinear sensing approaches.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据