Fabrication and Characterization of Active-Matrix 960 x 540 Blue GaN-Based Micro-LED Display

In this paper, we demonstrate a high-resolution 960 x 540 blue-emitting active matrix micro-display. The blue micro-display have a diagonal length of 0.55 inch, a pixel size of 8 mu m with a pixel pitch of 12.8 mu m, and high pixel density of 2000 pixels per inch. The single pixel of microdisplay exhibits excellent characteristics including an extremely low-leakage current of 0.1 pA at -5 V, a low forward voltage of 2.73 V, a narrow full width at half maximum of 15.7 nm of electroluminescence spectra, a high external quantum efficiency of 13.3%, and a deep-blue emission with CIE coordinates of (0.1589, 0.0542) at 11 mu A. Besides, the single pixel of micro-LED also shows high brightness of 4.2 x 10(6) and 7.4 x 10(6) cd/m(2) at 500 mu A and 1 mA, respectively. The complete 960 x 540 microdisplay has a contrast ratio of 3 600 000: 1, the power consumption with all on is 0.5 W, and the pixel yield rate of about 98.674% analyzed by the software ImageJ.