Microwave bandpass filters based on thin-film acoustic resonators: theory and experiment

We theoretically and experimentally analyze microwave thin-film acoustoelectronic bandpass ladder filters built on AlN-based thin-film acoustoelectronic microwave resonators operating in the frequency range 4.6-5 GHz and describe the technology of their fabrication. We demonstrate that the parameters of filters are mainly determined by the characteristics of resonators that make up the filter and show that the characteristics of a three-section ladder filter can be significantly improved by optimizing the areas of the upper electrodes of the series and parallel resonators contained in it.