期刊
PLASMA SOURCES SCIENCE & TECHNOLOGY
卷 28, 期 3, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/1361-6595/ab0942
关键词
beam-plasma discharge; dielectric cavity; fore-vacuum plasma-cathode electron source
资金
- RFBR [18-38-00009 mol_a]
- Russian Ministry of Science and Higher Education [1.1550.2017/4.6]
- research program 'Leading Scientist' [3.6441.2017/6.7]
We have explored the beam-plasma discharge excited by the injection of a continuous electron beam with energy 1-10 keV and current 10-60 mA into a cylindrical dielectric cavity at a pressure of 1-10 Pa. The plasma density and the electron temperature of the discharge are 1.2-3 times greater than for the plasma formed by electron beam transport in the vacuum chamber without a cavity. We describe a model in which there is an additional inflow of energy into the discharge from secondary electrons emitted from the cavity surface by beam electrons and from plasma ions accelerated in the near-wall sheath. We show that this discharge can be used for efficient ion etching of the inner surface of dielectric vessels.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据