期刊
NANOSCALE
卷 11, 期 12, 页码 5203-5208出版社
ROYAL SOC CHEMISTRY
DOI: 10.1039/c8nr10007a
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资金
- National Key Research and Development Program of China [2016YFB1001300]
- National Natural Science Foundation of China [11527901]
- Fundamental Research Funds for the Central Universities [2017FZA5003, 2018FZA5004]
- Key Lab of optical Fiber Sensing and Communications (Ministry of Education)
By using a self-assembly method, SU-8 whispering gallery mode optical microcavities with an ultra-smooth surface (sigma < 0.6 nm) and high-Q factors (approximate to 10(4)) are fabricated. As an application of the microcavities, we demonstrate a polydimethylsiloxane packaged temperature sensor with high sensitivity (120 pm per degrees C) and long-term stability (over one year). These results illustrate broad application potential in ultrasensitive sensors and microlasers.
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