期刊
PLASMA SOURCES SCIENCE & TECHNOLOGY
卷 28, 期 5, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/1361-6595/ab17a1
关键词
low temperature plasma; nanosecond pulse; high repetition frequency; electron thermalization; electron-ion recombination; argon; water
资金
- National Science Foundation [ECCS-1619547]
A 0D kinetic model was developed to understand the electron-ion recombination in a plasma generated by high repetition frequency nanosecond pulses in argon with trace amounts (0.1% or less by volume) of water vapor at a total pressure of several Ton. The influence of trace amounts of water on the electron temperature and density decay was studied by solving electron energy and continuity equations. In pure argon, Ar+ ions dominate, the electron temperature is very slow to thermalize, and the recombination of electrons is also very slow. The presence of trace amounts of water impurity drastically reduces the electron thermalization time and increases the rate of recombination. The kinetic model provides a good fit to the previously acquired experimental data.
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