期刊
2019 IEEE WORKSHOP ON MICROELECTRONICS AND ELECTRON DEVICES (WMED)
卷 -, 期 -, 页码 10-14出版社
IEEE
DOI: 10.1109/wmed.2019.8714127
关键词
perpendicular magnetic tunnel junctions; CoPd alloys; coercivity; anisotropy; seed layers; XRD; SEM
资金
- MINT Center
- Department of Electrical and Computer Engineering
- Department of Physics and Astronomy
- Department of Metallurgical and Materials Engineering
We have intensively studied perpendicular magnetic anisotropy (PMA) CoPd alloys, both structurally and magnetically, as a simple means of pinning MgO-based perpendicular magnetic tunnel junctions (pMTJs) for spintransfer torque magnetic tunnel junction (STT-MRAM) applications. A compositional study of the CoxPd100-x alloys at 50 nm thickness showed that the maximum coercivity and anisotropy was found for Co25Pd75. Perpendicular magnetic tunnel junction stacks were deposited using different compositions of CoPd. Current-in-plane tunneling measurements indicated that the TMR values roughly correlated with the coercivity and anisotropy of the single layers. A thickness study indicated that the alloy was fully perpendicular for thicknesses as low as 20 nm. Various seed layers were employed to optimize the coercivity of the Co25Pd75 layer. Magnetometry, X-ray diffraction (XRD) and scanning electron microscopy (SEM) studies were carried out to relate the magnetic and structural properties of these layers.
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