High Performance Micro Gas Chromatography Column Using Mesoporous Silica as Stationary Phase

A micro-fabricated semi-packed gas chromatography (mu GC) column embedded micro-elliptical pillars was fabricated based on micro-electro-mechanical system (MEMS) technique. The mesoporous silica film (MS) with 2 nm pore size and large specific surface area was coated on the inner surface of the mu GC column as stationary phase. Under the same injection volume and the temperature-programmed conditions, the baseline separation of alkanes (C5-C10) was realized by the mu GC column used MS as stationary phase, and the resolution of pentane and solvent (impurity) could be as large as 3.6. Compared with the GC column used polydimethylsiloxane (PDMS) as stationary phase, the number of theoretical plates of octane had a 46% increase, which could be up to 14458 plates. Meanwhile, the peak area of nonane increased by 349.8%.