期刊
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
卷 164, 期 5, 页码 B3096-B3100出版社
ELECTROCHEMICAL SOC INC
DOI: 10.1149/2.0151705jes
关键词
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资金
- European Union Seventh Framework Programme (FP7) [604360]
- French RENATECH network
- Conseil General de l'Essonne
This paper presents the development of nickel phosphorus (Ni-P) micromolding for the manufacturing of a 3D electrostatic energy harvesting microsystem. Ni-P alloy exhibits weak ferromagnetic properties beyond 10-12 wt% phosphorus content. Deposits were prepared at different current densities (-10 to -150 mA/cm(2)) and concentration of phosphorous acid in the electrolyte (0-20 g/l). It was found that the deposition rate decreases when phosphorus content increases in the deposit. The final process leaded the choice of a H3PO3 concentration of 5 g/l to reach a 0.1 mu m/min deposition rate for phosphorus content higher than 13 wt%. Mechanical, electrical and magnetic properties of the Ni-P films were investigated on 1 mm(2) and 1 cm(2) square deposit and confirmed the suitability of that material for the target MEMS. Comb patterns of micromolded Ni-P have been realized on a 2-inch wafer, leading to a 10 mu m thick deposit containing 13.5 wt% in P, which is, at our knowledge, the first high phosphorus Ni-P micromolding involving electrodeposition growth for 3D MEMS applications. (C) The Author(s) 2017. Published by ECS.
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