Microstructure and mechanical properties of TiSiN coatings deposited on the Ti(C,N) based cermets

A series of TiSiN coatings were deposited on the surface of Ti(C,N) based cermets by multi-arc ion plating technique with different substrate negative bias. The microstructure, composition and mechanical properties of the coatings were studied. The results showed that the TiSiN coating showed a typical columnar growth, and composed of TiN, amorphous Si3N4 and a few TiSi2 phases. There was an element diffusion at the interface between the substrate, transition layer and coating, which resulted in a relatively smaller compressive residual stress in the coating and relatively higher adhesion of the coating on substrate. For the coating with the substrate negative bias of -200 V, it had a relatively higher hardness, adhesion strength and wear resistance, and the wear mechanisms were adhesive and oxidative wear. (C) 2019 The Ceramic Society of Japan. All rights reserved.