期刊
IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY
卷 7, 期 1, 页码 914-918出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JEDS.2019.2933369
关键词
beta-Ga2O3FET; diamond; nano-membrane; thermal conductivity; self-heating effect
资金
- Office of Naval Research
To suppress severe self-heating under high power density, we herein demonstrate top-gate nano-membrane beta-gallium oxide ( beta-Ga2O3) field effect transistors on a high thermal conductivity diamond substrate. The devices exhibit enhanced performance, with a record high maximum drain current of 980 mA/mm for top-gate beta-Ga2O3 field effect transistors and 60% less temperature increase from reduced self-heating, compared to the device on a sapphire substrate operating under identical power density. With improved heat dissipation, beta-Ga2O3 field effect transistors on a diamond substrate are validated using an ultrafast high-resolution thermoreflectance imaging technique, Raman thermography, and thermal simulations.
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