期刊
PLASMA SOURCES SCIENCE & TECHNOLOGY
卷 28, 期 9, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/1361-6595/ab393d
关键词
atmospheric pressure plasma; COST-Jet; mu-APPJ; electron density; operando absorbed power; plasma impedance; helium plasma
资金
- DFG [PAK 816, CRC 1316]
Atmospheric pressure plasmas have great potential, especially for biomedical applications, due to the large number of reactive species produced. In particular with regard to these applications, the comparability of processes through appropriate control of plasma parameters is essential for treatment safety. Here we present a method for the operando determination of absolute absorbed power in an RF atmospheric pressure helium plasma discharge using miniaturized probes. A detailed error analysis demonstrates the reliability of the measured power values. With the help of a global model, the sheath width and electron density (4 x 10(16)-11 x 10(16) m(-3)) are derived from these power measurements and compared to literature. The results and thus the validity of the electrical model are confirmed by a second, independent characterization method using optical emission spectroscopy and time-averaged imaging.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据