Surface Plasmon Enhanced Light Trapping in Metal/Silicon Nanobowl Arrays for Thin Film Photovoltaics

Enhancing the light absorption in thin film silicon solar cells with nanophotonic and plasmonic structures is important for the realization of high efficiency solar cells with significant cost reduction. In this work, we investigate periodic arrays of conformal metal/silicon nanobowl arrays (MSNBs) for light trapping applications in silicon solar cells. They exhibited excellent light-harvesting ability across a wide range of wavelengths up to infrared regimes. The optimized structure (MSNBsH) covered by SiO2 passivation layer and hemisphere Ag back reflection layer has a maximal short-circuit density (J(sc)) 25.5 mA/cm(2), which is about 88.8% higher than flat structure counterpart, and the light-conversion efficiency (eta) is increased two times from6.3% to 12.6%. The double-side textures offer a promising approach to high efficiency ultrathin silicon solar cells.