期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 26, 期 4, 页码 718-739出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2017.2699864
关键词
Microsystems; microelectromechanical systems; plasmonic surface; micro/nano fabrication; plasmonics; biosensing
类别
资金
- National Institute of Health (NIH) Director's Transformative Research Award [R01HL137157]
- National Science Foundation (NSF) CAREER Award [0846313]
- Defense Advanced Research Projects Agency (DARPA) Young Faculty Award [N66001-10-1-4049]
Low-profile patterned plasmonic surfaces are synergized with a broad class of silicon microstructures to greatly enhance near-field nanoscale imaging, sensing, and energy harvesting coupled with far-field free-space detection. This concept has a clear impact on several key areas of interest for the microelectromechanical systems community, including but not limited to ultra-compact microsystems for sensitive detection of small number of target molecules, and surface devices for optical data storage, micro-imaging, and displaying. In this paper, we review the current state-of-the-art in plasmonic theory, as well as derive design guidance for plasmonic integration with microsystems, fabrication techniques, and selected applications in biosensing, including refractive-index based label-free biosensing, plasmonic integrated lab-on-chip systems, plasmonic near-field scanning optical microscopy, and plasmonics on-chip systems for cellular imaging. This paradigm enables low-profile conformal surfaces on microdevices, rather than bulk material or coatings, which provide clear advantages for physical, chemical, and biological-related sensing, imaging, and light harvesting, in addition to easier realization, enhanced flexibility, and tunability.
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