MEMS for Nanopositioning: Design and Applications

Nanopositioners are high-precision mechatronic devices that are capable of generating mechanical motion with nanometer or sub-nanometer resolution. With this motion typically being available over mechanical bandwidths of several kilohertz or greater, nanopositioners have become important tools for many areas of nanotechnology. A major development in nanopositioning has been the use of microelectromechanical systems (MEMS) fabrication processes to produce microscale nanopositioners. These MEMS-based devices are conceptually similar to their macroscale counterparts, typically comprising an end effector, actuators, sensors, and suspension structures. However, MEMS nanopositioners potentially offer additional significant advantages as a result of their microfabricated nature, including a much smaller footprint, higher bandwidth, batch manufacturability, and potential for integration with electronic circuits. This paper reviews key concepts regarding the design, actuation, and sensing of MEMS nanopositioners, and explores how they have been implemented in state-of-the-art devices within a range of nanotechnology applications.