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Hetero-epitaxy of high quality germanium film on silicon substrate for optoelectronic integrated circuit applications

期刊

JOURNAL OF MATERIALS RESEARCH
卷 32, 期 21, 页码 4025-4040

出版社

SPRINGER HEIDELBERG
DOI: 10.1557/jmr.2017.324

关键词

epitaxy; bonding; optoelectronic

资金

  1. National Research Foundation Singapore through the Singapore MIT Alliance for Research and Technology's Low Energy Electronic Systems (LEES) IRG
  2. SMART Innovation Center
  3. Silicon Technologies Center of Excellence (Si-COE)
  4. SMA3 Fellowship
  5. silicon photonics group, Optoelectronics Research Center at the University of Southampton
  6. [NRF-CRP12-2013-04]

向作者/读者索取更多资源

Integration of photonic devices on silicon (Si) substrates is a key method in enabling large scale manufacturing of Si-based photonic-electronic circuits for next generation systems with high performance, small form factor, low power consumption, and low cost. Germanium (Ge) is a promising material due to its pseudo-direct bandgap and its compatibility with Si-CMOS processing. In this article, we present our recent progress on achieving high quality germanium-on-silicon (Ge/Si) materials. Subsequently, the performance of various functional devices such as photodetectors, lasers, waveguides, and sensors that are fabricated on the Ge/Si platform are discussed. Some possible future works such as the incorporation of tin (Sn) into Ge will be proposed. Finally, some applications based on a fully monolithic integrated photonic-electronic chip on an Si platform will be highlighted at the end of this article.

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