期刊
JOURNAL OF INDUSTRIAL AND ENGINEERING CHEMISTRY
卷 52, 期 -, 页码 7-11出版社
ELSEVIER SCIENCE INC
DOI: 10.1016/j.jiec.2017.03.033
关键词
Gas composition; Decomposition of CHF3; Dielectric barrier discharge; Electrical properties of plasma discharge; Light emission of gas discharge
资金
- National Research Foundation of Korea (NRF) - Korean Government [NRF-2016R1D1A1A09917214]
Discharge properties of atmospheric pressure plasma depend on the composition of the plasma gas. The effects of gas composition on the discharge properties of the atmospheric pressure plasma were investigated in a dielectric barrier discharge reactor immersed in an oil bath for CHF3 decomposition. A variation of the CHF3 fraction of several thousandths (0-0.8%) in the feed led to a significant change in the electrical properties of the plasma discharge when N-2 was a dilution gas; however, it did not occur with Ar or He as a dilution gas. Moreover, NZ dilution gas showed high-energy photons in the visible spectrum. (C) 2017 The Korean Society of Industrial and Engineering Chemistry. Published by Elsevier B.V. All rights reserved.
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