期刊
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
卷 37, 期 6, 页码 -出版社
A V S AMER INST PHYSICS
DOI: 10.1116/1.5123287
关键词
-
资金
- European Union's Seventh Framework Program for research, technological development, and demonstration [318804]
Tip-based electron beam induced deposition is performed using field emission of low-energy electrons from the tip of an active (i.e., self-sensing and self-actuating) atomic force microscope cantilever inside a scanning electron microscope. By using the active cantilever for feature placement and metrology combined with fast switching between field-emission and noncontact imaging mode, high placement accuracy and time-efficient, precise 3D measurement of the deposits are enabled. First results on the effect of electron energy and exposure dose on the growth rates and dimensions of the deposits are presented, and the potential to increase spatial resolution due to the enhanced localization of the dissociation reactions induced by the low-energy electrons is discussed.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据