期刊
2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)
卷 -, 期 -, 页码 919-921出版社
IEEE
DOI: 10.1109/memsys.2019.8870616
关键词
-
资金
- European Union [780283]
We experimentally demonstrate a silicon MEMS phase shifter achieving more than pi phase shift with sub dB insertion loss (IL). The phase is tuned by reducing the gap between a static suspended waveguide and a free silicon beam, via comb-drive actuation. Our device reaches 1.2 pi phase shift at only 20 V. with only 0.3 dB insertion loss - an order of magnitude improvement over previously reported MEMS devices. The device has a small footprint of 50x70 mu m(2) and its power consumption is 5 orders of magnitude lower than that of traditional thermal phase shifters. Our new phase shifter is a fundamental building block of the next-generation large scale reconfigurable photonic circuits which will find applications in datacenter interconnects, artificial intelligence (AI). and quantum computing.
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