3.8 Proceedings Paper

MAXIMIZING PERCOLATION EFFECT USING SUB-100 nm NANO-VALLEY FOR HIGH PERFORMANCE WEARABLE TRANSPARENT PRESSURE SENSOR

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IEEE
DOI: 10.1109/memsys.2019.8870688

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资金

  1. KAIST GCORE (Global Center for Open Research with Enterprise) - Ministry of Science and ICT [N11180096]
  2. Open Innovation Lab Cooperation Project - National Nano Fab Center (NNFC) [PCOI1804M002]
  3. Basic Research Program through the National Research Foundation of Korea (NRF) - Ministry of Science and ICT (MSIT) [NRF-6272017R1A2B3005221]

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This paper reports a high-sensitivity wearable transparent pressure sensor by maximizing the percolation effect using a sub-100 nm nano-valley. The secret to achieving high sensitivity is to make the nano-valley as narrow as possible to maximize the percolation effect (stress concentration effect). The narrow nano-valley pressure sensor showed a remarkable 400% enhancement in sensitivity compared to a sensor with no nano-valley while maintaining a high transmittance of 83%. This sensitivity value is higher than those of the previous wearable transparent pressure sensors. The fabricated sensor also showed high durability with low variation of 1.2% in repeated pressing of up to 100,000 times under 100 kPa pressure.

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