期刊
2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)
卷 -, 期 -, 页码 488-491出版社
IEEE
DOI: 10.1109/memsys.2019.8870717
关键词
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资金
- NSF [ECCS-1711227]
- Midea Group
- Philippine-California Advanced Research Institutes (PCARI) under the project of Chemical and Environment -Portable Sensor Technologies (CE-PoST)
- BSAC (Berkeley Sensor and Actuator Center, a NSF/Industry/University collaboration center)
- Shenzhen Fundamental Research Funds [JCYJ20150831192244849]
- Shenzhen Technology Research Funds [JSGG20170414094227487]
- China Scholarship Council
- TBSI
This work marks the first use of an AC sensing technique on a graphene transistor to realize label-free gas sensing of 100 ppb-level formaldehyde in the air at room temperature. Compared with the state-of-art technology, three distinctive advances have been achieved: (1) extraordinary sensitivity of trace amount of formaldehyde using an AC phase detection method on a single graphene transistor made of the monolayer graphene from the chemical vapor deposition (CVD) process without adding functional materials; (2) high signal stability on devices with or without artificial defects; (3) fast response time of 10 seconds and recovery time of 60 seconds with minimal baseline drifts. As such, the proposed AC sensing method can achieve fast detection of the low concentration formaldehyde in air with reproducible performances on CVD graphene with different defect densities.
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