期刊
出版社
IEEE
DOI: 10.1109/transducers.2019.8808614
关键词
MEMS; PMUT; hexagonal array; spurious mode; surface micromachining
This paper presents a hexagonal piezoelectric micromachined ultrasonic transducer (PMUT) array that can avoid spurious modes known to occur by mode coupling with adjacent elements. By designing an optimal hexagonal PMUT array with 10 mu m spacing resulting in high fill -factor, we were able to experimentally demonstrate well-matched spurious mode free resonances operating around 10 MHz. Furthermore, the effects of the center PMUT in arrays were investigated through various array designs based on finite clement method (FEM) simulations and experimental measurements.
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