期刊
出版社
IEEE
DOI: 10.1109/transducers.2019.8808602
关键词
Gas sensors; thermo-electrocatalytic; CMOS; MEMS; carbon monoxide; hydrogen; thermopile
This work reports on the use of a CMOS based thermo-electrocatalytic (TE) gas sensors for selective detection of hydrogen and carbon monoxide. Palladium and platinum oxidation catalysts were employed and deposited onto the substrates by means of ink-jet printing. The manuscript explores the impact that the catalyst and the microheater operational temperature have on the sensing performance particularly in relation to gas sensitivity and selectivity. Benchmarking tests between the TE sensors and commercial metal oxide chemiresistors were also carried out.
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