期刊
出版社
IEEE
DOI: 10.1109/transducers.2019.8808607
关键词
Mode localization; MEMS accelerometer; mechanical coupler; parametric sensitivity
This paper reports a mode-localized resonant accelerometer (ML-RXL) with novel designed micro-lever mechanical coupler to significantly enhance its parametric sensitivity. The experiment results demonstrate the sensitivity of prototype is 32.49 AR/g in the linear operating region of 0.37g, which is one order of magnitude higher than prior work [1] and paves the way for ML-RXL to achieve the sub-mu g resolution.
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