期刊
JOURNAL OF CRYSTAL GROWTH
卷 468, 期 -, 页码 129-134出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.jcrysgro.2016.11.005
关键词
Characterization; Metalorganic chemical vapor deposition; Polycrystalline deposition; Gallium compounds; Oxides
资金
- JSPS KAKENHI [15K14299]
- Grants-in-Aid for Scientific Research [15K14299] Funding Source: KAKEN
Low temperature metalorganic chemical vapor deposition using trimethylgallium and water was investigated. The surface morphology of the film was almost flat at a deposition temperature below 182 degrees C. This flat film was a mixture of nanocrystalline and amorphous phase. The film deposited at a temperature of 272 degrees C resulted in a nanowire structure. X-ray diffraction measurements revealed that the nanowire film was a mixture of gallium hydroxide, gallium oxyhydroxide, and gallium tohdite or gallium oxide. We also found that post-deposition annealing above 600 degrees C significantly changed the crystal structure of the both flat and nanowire films. Monoclinic gallium oxide phase was dominant after the post-deposition annealing above 600 degrees C.
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