A flexible microsystem capable of controlled motion and actuation by wireless power transfer

A flexible microsystem that has an integrated coil to enable wireless energy transfer via inductive coupling can offer controlled locomotion using two catalytic micro-engines and controlled actuation using thermoresponsive micro-arms. Microscale systems that can combine multiple functionalities, such as untethered motion, actuation and communication, could be of use in a variety of applications from robotics to drug delivery. However, these systems require both rigid and flexible components-including microelectronic circuits, engines, actuators, sensors, controllers and power supplies-to be integrated on a single platform. Here, we report a flexible microsystem that is capable of controlled locomotion and actuation, and is driven by wireless power transfer. The microsystem uses two tube-shaped catalytic micro-engines that are connected via a flat polymeric structure. A square coil is integrated into the platform, which enables wireless energy transfer via inductive coupling. As a result, the catalytic engines can be locally heated and the direction of motion controlled. Our platform can also integrate light-emitting diodes and a thermoresponsive micro-arm that can be used to perform grasp and release tasks.