One-batch transfer process for the additive manufacturing of a cantilever with a weight

An improved transferring process that can be used to additively fabricate a cantilever with a weight is reported. By using a poly(dimethylsiloxane) template with a cavity relief structure for the weight formation, an increase in the number of process steps was not required. A capacitive acceleration sensor was successfully manufactured using the described process. Enhanced responsiveness of the sensor was clearly shown to result from the effect of the weight. The one-batch transfer process has the potential to significantly simplify the manufacturing process of highly responsive hollow structures and could be applied in the fabrication of various microelectromechanical system sensors. (C) 2017 The Japan Society of Applied Physics