期刊
RSC ADVANCES
卷 10, 期 34, 页码 19936-19942出版社
ROYAL SOC CHEMISTRY
DOI: 10.1039/d0ra02567d
关键词
-
资金
- Horizon 2020 project SKYTOP Skyrmion-Topological Insulator and Weyl Semimetal Technology (FETPROACT-2018-01) [824123]
Antimony telluride (Sb2Te3) thin films were prepared by a room temperature Metal-Organic Chemical Vapor Deposition (MOCVD) process using antimony chloride (SbCl3) and bis(trimethylsilyl)telluride (Te(SiMe3)(2)) as precursors. Pre-growth and post-growth treatments were found to be pivotal in favoring out-of-plane and in-plane alignment of the crystallites composing the films. A comprehensive suite of characterization techniques were used to evaluate their composition, surface roughness, as well as to assess their morphology, crystallinity, and structural features, revealing that a quick post-growth annealing triggers the formation of epitaxial-quality Sb(2)Te(3)films on Si(111).
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