期刊
SILICON PHOTONICS XV
卷 11285, 期 -, 页码 -出版社
SPIE-INT SOC OPTICAL ENGINEERING
DOI: 10.1117/12.2543748
关键词
Photonics; silicon; SiN; CWDM; transceiver; platform; polarization; crossing
资金
- H2020 European Research Council [688516]
- French national program IRT Nanoelec [ANR-10-AIRT-05]
A mature silicon photonics platform including various materials for a wide range of functionalities is needed to achieve high-speed and energy-efficient transceivers for Datacom. We present the latest developments of our 200mm silicon photonics platform including new devices in silicon nitride along with active devices. In particular, we demonstrate a high performance SiN Echelle Grating CWDM (de-)multiplexer obtained with advanced photolithography tools, hybrid Si-SiN polarization splitter rotator, SiN edge coupler and low-loss, low-crosstalk Si-SiN and SiN-SiN crossings.
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