期刊
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
卷 93, 期 9-12, 页码 4389-4398出版社
SPRINGER LONDON LTD
DOI: 10.1007/s00170-017-0881-1
关键词
Single crystalline sapphire; Polycrystalline diamond (PCD) micro-milling tool; Tool reconditioning
资金
- MEXT/JSPS KAKENHI [16KK0153]
- Grants-in-Aid for Scientific Research [16KK0153, 15H03906] Funding Source: KAKEN
Ultra-precision machining of single crystalline sapphire was performed using a polycrystalline diamond (PCD) micro-milling tool. Examination of the machining characteristics indicates that a high-quality surface with a nanometre-scale surface roughness can be obtained when the removed chips are thin enough to achieve ductile-mode machining. Although a high-quality surface was successfully machined, the surface roughness gradually deteriorated and the actual depth of the machined groove became shallower as the machining distance increased because of the build-up of material adhering to the surface of the tool. To retain the milling capabilities of the PCD tool, an electrochemical-assisted surface reconditioning process has been proposed. The reconditioning technique was found to be effective in removing the surface contaminant without causing damage to the edges of the tool.
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