期刊
IEEE ELECTRON DEVICE LETTERS
卷 38, 期 4, 页码 477-480出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2017.2672683
关键词
a-IGZO TFTs; NBIS; PBR; temperature; TCAD
资金
- Industrial Strategic Technology Development Program [10045269]
- Development of Soluble TFT and Pixel Formation Materials/Process Technologies for AMOLED TV through MOTIE/KEIT
This letter demonstrates a short-time pulsed positive bias recovery (PBR) of the degraded performance of amorphous indium-gallium-zinc oxide (a-IGZO) thin-film-transistors (TFTs) under negative bias illumination stress (NBIS) with the IGZO of In: Ga: Zn = 3: 2: 1 atomic ratio. By applying simultaneous gate and drain voltages (VG = VD = 35 V) for a very short duration (10(-3) s) after NBIS, the performance could be completely recovered. TCAD simulation confirms that the temperature increases up to 410 degrees C by 35 V PBR, which accelerates the neutralization of generated interface charges and bulk donors by capturing electrons and then relax back to the pristine state.
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