期刊
MICRO AND NANO SYSTEMS LETTERS
卷 8, 期 1, 页码 -出版社
SPRINGERNATURE
DOI: 10.1186/s40486-020-00127-8
关键词
Capacitive pressure sensor; Hollow PDMS foam; Porosity
资金
- Pusan National University
We propose a highly sensitive capacitive pressure sensor made of hollow polydimethylsiloxane (PDMS) foam with a three-dimensional network structure. The stiffness of the foam is adjusted by the viscosity of the PDMS solution. The fabricated PDMS-30 (PDMS 30 wt%) foam shows extremely high porosity (>86%) approximately 19 times that of bare PDMS (PDMS 100 wt%) foam. Capacitive pressure sensors fabricated using the foam possess high sensitivity, good compressibility (up to 80% strain), and consistent output characteristics in a 2000-cycle test.
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